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Layered structures of piezoelectric films are the core of recently emerged film acoustic resonators of both film bulk acoustic resonators (FBAR) and surface mounted resonators (SMR). As products of film acoustic wave resonators are being accepted in telecommunication applications, notable advantages and acceptable performance have been subjected to possible improvements with structures, materials,...
The rapid development of wireless communication technology and the clear trend of higher frequency, miniaturization, and integration of RF components have provide opportunities through the research and production of thin film bulk acoustic resonators (TFBAR). In the design of TFBAR products, how to determine the frequency is always the starting point. The thickness-extension type of resonators can...
We investigate surface acoustic waves (Rayleigh waves) in a half-space magneto-electro-elastic material structure. The magneto-electrically open and short conditions at the surface are taken to solve this problem. The phase velocity can be numerically calculated and figured for the magneto-electrically open and short cases, respectively, for different piezomagnetic coefficient. The methods and procedures...
Thermal property of surface acoustic wave (SAW) resonators is always of interests to product design and applications with the objective of accurate prediction of device performance. Theoretical and experimental studies have been carried out for the prediction of the thermal effect of piezoelectric substrates undergoing temperature change and structural complications frequently encountered in acoustic...
Initial stresses are inevitable in acoustic wave devices due to the complicated manufacturing process with ubiquitous thermal treatment procedures and environmental temperature changes. In addition, acoustic waves have been utilized as force sensors which require a good stress-frequency relationship for measurement applications. In other words, for both device performance improvement and precision...
We have found that the spatial variation of material properties such as elastic constants and density will result in significant changes in surface acoustic waves (Rayleigh waves) in a semi-infinite substrate including the wave velocity and deformation, implying potential advantages in modifying the velocity (frequency) and changing the surface deformation which are directly related to device performance...
Among many parameters important in surface acoustic wave resonator analysis and design, accurate prediction of the phase velocity and displacement fields is essential. Since surface acoustic wave analysis usually is done for a semi-infinite elastic solid, simplified methods which have only one spatial coordinate considered are applied to devices which are finite piezoelectric strips serving as a substrate...
It is generally known that surface acoustic waves, or Rayleigh waves, have different mode shapes in infinite plates. To be precise, there are both exponentially decaying and growing components in plates appearing in pairs, representing symmetric and anti-symmetric modes in a plate. As the plate thickness increases, the combined modes approached to the Rayleigh mode in a semi-infinite solid, exhibiting...
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