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After the Tohoku Earthquake at 11 March, 2011, the National Institute of Advanced Industrial Science and Technology (AIST) launched a cross-discipline partnership project; “Kesennuma Kizuna Project”, in the disaster area Kesennuma, Miyagi Pref. We started new activities for implementing smart communities' technologies, such as energy managements, robots' life care technologies, monitoring systems,...
In this paper we present our recent attempts at developing the advanced information processing devices by integrating nano-electro-mechanical (NEM) structures into conventional silicon nanodevices. Firstly, we show high-speed and nonvolatile NEM memory which features a mechanically-bistable floating gate is integrated onto MOSFETs. Secondly we discuss hybrid systems of single-electron transistors...
We analyzed the switching and readout properties of the NEMS memory. We found that the damping factor influences highly on the transient response time and is important for the fast operations. By assuming the best damping parameter, the transient response times for the readout operation were found about 20 ns and 90 ns for the ON and OFF states, respectively. And the switching time was about 80 ns...
The nonvolatile NEMS memory concept is based on the electro-mechanical bistability of the sub-??m-long NEMS structure (Fig. 1). It features a buckled SiO2 bridge which is suspended in the cavity and incorporates the Si nanodots (SiNDs) as single-electron storage. The bridge flips by applying the gate electric field, and its flip-flop motion may be sensed electrically by MOSFET underneath. In this...
Nanopatterns of alkanethiol-capped gold nanoparticles are fabricated on photocurable polymer surface using a photo-nanoimprint method. The surface morphology of the nanopattern is observed by scanning electron microscopy and transmission electron microscopy. Spherical gold nanoparticles with a 3.5 nm average diameter and 500 nm line width is obtained.
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