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Using Becker method, we have made research on evaporation rate by considering the parameters of cathode manufacturing process that conclude the tungsten base porosity, aluminate formulation and the coated film material. Finally, the impact level and the weight results are given quantitatively.
This article describes a micromachined quartz tuning fork resonator, 6 mm in height by 2 mm in diamter, holding a two-terminal electronic component with a nomial frequency of 36 kHz (at zero degree) and 15 pF typical capacitance paked in a 90 Pa He gass sealed metal container, which has been used as a sensor for temperature measurement with good sensitivity, repeatability and reliability. The temperature...
A miniature digital temperature sensor with the ZY cut quartz crystal tuning fork resonators was developed. The quartz crystal tuning fork resonators have the characteristic that the resonance frequency changes by the external temperature, which achieves high sensitivity and high-speed response and frequency stability by a sample structure. The quartz crystal tuning fork resonators are square cross...
This paper describes a novel quartz tuning fork temperature sensor, the principle of the quartz tuning fork temperature sensor is to detect resonance frequency shift by an external temperature. It has such advantages: high sensitivity, high accuracy, and good long-term stability. The temperature sensor is prepared of synthetic quartz on ZY-cut plates and configured by ZY-Cut quartz crystal wafer based...
In this paper, a highly sensitive temperature sensor based on quartz tuning fork resonators is reported. The temperature sensor is configured by ZY (110deg/10deg) Cut quartz crystal wafer based bulk acoustic wave (BAW) tuning fork resonators whose operating frequency is at 31 KHz. The ideal thermo-sensitive ZY cut for quartz tuning fork resonators is analyzed with the theory. The characterization...
This paper presents the results from investigations of thermal sensitivity, thermal response time and long-term stability of a newly miniaturized design of thermal sensitive quartz tuning fork resonator working at flexural mode with ZY-cut at fundamental frequency of 32 kHz. Special attention is given to the methodology and equipment for calibration of quartz tuning fork temperature sensor. To obtain...
This paper discusses a smart temperature sensor system that comprises of a high performance quartz tuning fork temperature sensor, interface with CMOS circuitry and control algorithm for reconfiguration. The ideal thermo-sensitive cut for quartz tuning fork resonators is analyzed with the theory. The specific cut quartz tuning fork was fabricated using photolithography and the etching technology....
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