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Hotspot cooling by heat spreader is essential to avoid reliability issues of the power electronic devices. Herein, the evaluation of the heat spreading capability of mono‐ and multi‐layer graphene using a Pt/Cu/Ti micro‐coil heater‐thermometer is reported. Monolayer graphene is grown and transferred onto the test structure which consists of micro‐coil, pads, and heat sinks. The temperature coefficient...
The study of the effects of photoresist thickness and the use of PECVD deposited oxide hard mask layer during source/drain high dose ion implantation process in the fabrication of ion-sensitive field effect transistor (ISFET) is presented. Implementation of the new optimized process for the source/drain implant mask together with the improved process module have been successful in improving the threshold...
The demand for accurate, fast response hydrogen detection is critical in several industries especially in medical diagnostics. Titania nanotubes used as the sensing element, were fabricated by anodization technique followed by annealing at 500°C. Nanotubes produced was found to have pore size ranging from 38 nm to 48 nm for inner diameter, 57 nm to 73 nm for outer diameter with applied anodization...
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