The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A simple and cost-effective route is described to exfoliate graphene through deposition of graphite particles on SU-8 pattern followed by the high-temperature pyrolysis process. During the pyrolysis process, the SU-8 photoresist pillars were slowly converted to desired glassy-like carbon posts and various gases were released such as carbon oxides, water vapor, methane and hydrogen. The splitting phenomenon...
An optimized process was developed for fabrication of high-aspect-ratio photoresist-derived carbon microelectrode array on silicon substrate. This process consisted of conventional photolithography, three-step linear pyrolyzing process and micromechanical interlocking. Comparing with previous two-step pyrolysis, three-step linear pyrolysis process can better preserve the geometry of microstructure...
This paper describes a new method to improve adhesion between high-aspect-ratio carbon micro/nano-structure and silicon substrate by micromechanical interlocking over conventional carbon micro-elecro-mechanical system (C-MEMS) process. Anisotropic wet chemical etching using potassium hydroxide (KOH) solution and aqueous tetramethyl ammonium hydroxide (TMAH) is applied to form various aspect-ratio...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.