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The paper considers some major problems of adapting the multi-detector method for three-dimensional (3D) imaging of wet bio-medical samples in Variable Pressure/Environmental Scanning Electron Microscope (VP/ESEM). The described method pertains to “single-view techniques”, which to create the 3D surface model utilise a sequence of 2D SEM images captured from a single view point (along the electron...
In this paper we demonstrate how the magnetic field influences the trajectory of an electron beam in a miniature transmission electron microscope integrated with an ion-sorption micropump utilizing strong permanent magnets. Simulations of the electron trajectories (COMSOL software) and experimental results (spots on ITO screen) are compared. It is discussed how to eliminate the negative effect of...
Mass spectrometry is one of the most powerful techniques that allows qualitative and quantitative characterization of chemical compounds. However, bulky high vacuum system required for analysis process limits application to professional laboratories. These restrictions can be overcome by replacing them with miniature high vacuum MEMS (Micro-Electro-Mechanical System). Our group, as the first in the...
We describe the fabrication process for an anode of a miniaturized transmission electron microscope. The anode consists of a very thin membrane (membrane-anode) that encloses the electron optics microsystem and it is used to separate the high vacuum part from the sample chamber in the microscope. The membrane-anode is made of Si3N4 layer deposited on an oxidized silicon substrate and was fabricated...
A computer programme for numerical modelling of electron flow in vacuum instruments is presented. The programme allows to simulate trajectories of charged particles in both high and low vacuum of the order of tens milibars. It combines a commercially available packet SIMION 3D v.7.0 destined for tracing trajectories of charged particles in electric and magnetic fields, and a Monte Carlo programme...
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