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The paper discusses the results of theoretical and experimental investigations of the functioning of two-electrode MEMS capacitors with changing interelectrode gap at non-parallel displacement of the electrodes. The measuring technique and experimental data on changes in the variable capacitor capacitance at non-parallel displacement of electrodes are presented. The experiments were performed both...
The design of MEMS electrostatic generator that converts the mechanical energy vibration into electrical energy is developed. The prototype of the generator has been implemented and tested. At vibration frequency of 67 Hz and external load resistance of 23.7 MΩ the output power of 175 W is achieved. The estimation of the maximum power density for one-capacitor and two-capacitor structures of MEMS...
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