The paper discusses the results of theoretical and experimental investigations of the functioning of two-electrode MEMS capacitors with changing interelectrode gap at non-parallel displacement of the electrodes. The measuring technique and experimental data on changes in the variable capacitor capacitance at non-parallel displacement of electrodes are presented. The experiments were performed both on the specially constructed capacitor model allowing to register the parameters of a mutual displacement of electrodes with changing inclination angle of the electrodes over a wide range, and on the variable micromechanical capacitors fabricated of (100) Si using IC technology.