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The article disserted the principle of the probe vacillated at testing a large silicon wafer with square four point probe equipment. The article introduces how to obtain the measurement result about the micro area in testing system of square four point probes inclined. Mapping diagram design method based on polar coordinates is introduced. Design principles graphics of 10°indexing angle is analyzed...
The sheet resistance of a silicon wafer with four point probes method is studied based on Labview software. With the help of data acquisition circuit and the Labview software programming, the resistivity of sillicon wafers is tested with the real-time. The system can also be completed for measurement data acquisition and data recordig, and other functions. The actual measurement and verification of...
Based on the research of characteristics of the hydraulic servo system, this paper developed a PID controller using LabVIEW to control the core part of the servo system control. A test was made on LabVIEW's own PID VI and the self-written PID VI respectively using a simulation test program. It is found that LabVIEW's own PID VI comes with the following defects: bad tracking accuracy, tracking lag...
A method is proposed to predict the flowing bottomhole pressures (FBHPs) for two‐phase coalbed methane (CBM) wells. The mathematical models for both gas column pressure and two‐phase fluid column pressure were developed based on the well liquid flow equation. FBHPs during the production were predicted by considering the effect of entrained liquid on gravitational gradients. Comparison of calculated...
In this paper, we present the investigation of inverse narrow width effect (INWE) of 65 nm low-power process with dual gate oxide shapes. To evaluate the impact of STI process on narrow devices, we conducted different experiments in STI process steps, including STI liner, STI elevation, STI liner annealing and STI nitride pullback. The result shows only STI liner annealing and STI nitride pullback...
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