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There are strong research programs in nanotechnology related to chemical sensors, electromechanical devices, actuators, biosensors, etc. in leading laboratories across the world. In many cases, practical systems demand seamless integration of the nanodevice with higher order structures, for example, MEMS. Examples of this using carbon nanotube based chemical and biosensors are presented.
We report on a CMOS-based microelectrode-array chip (6.5 by 6.5 mm2) for bidirectional communication (stimulation and recording) with electrogenic cells such as cardiomyocytes or neurons targeted at investigating electrical signal propagation within cellular networks in vitro. The integration of on-chip circuitry, which includes analog signal amplification and filtering stages, analog-to-digital converters,...
Recently, the ability to create engineered heart tissues with a preferential cell orientation has gained much interest. Here, we present a novel method to construct a cardiac myocyte tissue-like structure using a combination of dielectrophoresis and electro-orientation via a microfluidic chip. Using the interdigitated-castellated microelectrodes, the induction of a mutually attractive dielectrophoretic...
This paper describes a piezoelectric sensor integrated into a cavity at the tip of a biopsy needle intended for fine needle aspiration (FNA) of thyroid nodules. Located on a steel diaphragm of 300 µ m radius and 23 µ m average thickness, it is intended to aid in tissue differentiation, providing information that is complementary to any imaging method that may be used concurrently. The sensor is fabricated...
It is the first proposal to monitor cell deformability based on the lysis rate difference measured from the cells passing through a filter array having gradually increased orifice length. Compared to the previous methods [ 1-4], the present chips offer simple and inexpensive monitoring with high sensitivity. In the experimental study, we use normal and chemically treated erythrocytes to verify the...
This paper presents bioMEMS force sensors, consisting of a probe and flexible beams, to study mechanobiological response of single living cells subjected to mechanical injury. Mechanical injuries are simulated by the application of large indentation on the cells by the sensor probe. The green fluorescent protein (GFP) technique is used to visualize the evolution of the actin network in the cells....
We introduce and successfully demonstrate a novel method and system for subsequent dispensing, mixing and ejecting of picolitre liquid samples in a single step. The system consists of a free liquid film, suspended in a frame and positioned in front of a droplet dispenser. In this study we tested and modelled the flight of liquid droplets, ejected from an inkjet print head, through a suspended liquid...
Controlled chemical release has many applications, including treatment for diabetes and stimulation of neurons. In this paper we present a discrete chemical release method capable of delivering picoliter volumes of chemical solutions with 100 µ m spatial and 20 µ s temporal resolution. The releasing mechanism is based on the transfer of discrete picoliter sized liquid droplets from an ejecting nozzle...
This paper presents the design, fabrication and measurement results of a dual-axis electromagnetic scanning micromirror utilizing radial magnetic field. The scanner is comprised of a gimbaled single-crystal-silicon micromirror with a single turn electroplated metal coil, assembled passively above a concentric permanent magnet assembly. Proposed scanner utilizes the radial magnetic field rather than...
We proposed a wedge prism which is tunable by electrowetting actuation. The wedge prism is useful for a small camera or an endoscope, because the wedge prism is capable of changing the view without a large instrument. Our prism consists of two plates facing each other and liquid sandwiched between the plates. By changing the angle between the two plates, the liquid and the two plates form into the...
In this paper, we report on the transmissive scanning micromirrors for an autostereoscopic display. Double-sided micromirrors actuated by both external magnetic force and Lorentz force were designed and fabricated based on the MEMS technology, and some characteristics of a micromirror were measured. Fabricated micromirrors, a microlens array and an LED matrix were integrated into a prototype of the...
We propose a new type of an electronic re-writable black-board that keeps the trace of finger-drawn strokes using the bitmap of scatting light from segmental membrane. Images can be erased entirely or partially by releasing voltage or pulling back the membrane with magnetic force, respectively. Thanks to the simplicity of the device structure and principle, the proposed display has scalability to...
We present the use of electrowetting as a technology for very bright and energy-efficient displays. The intrinsic nature of the system as an optical switch provides an excellent starting point upon which a wide variety of display configurations can be based. Here we focus our discussion on reflective displays, in which the main advantages of the technology are best utilized. The properties of the...
A microfluidic bio-particle sorter has been developed utilizing a concept that a microchannel network acts as a resistive circuit when a Newtonian fluid is continuously introduced into the network. By hydrodynamically rectifying the particle positions inside the microfluidic circuit, particles suspended in liquid are perfectly aligned onto one sidewall inside the microchannel, and then concentrated...
High speed particles and biomolecules sorter was realized using thermosensitive hydrogel and water two-phase sheath flow system. The two phase sheath flow consists of a water flow including samples and two hydrogel carrier flows is utilized instead of the air and water droplet two-phase flow used in the conventional commercialized cell sorter. Flow switching is performed by the sol-gel transfer of...
In this paper, we report design, fabrication and characterization of a MEMS based integrated particle detection chip for real time environmental monitoring. The chip is designed on the basis of aerosol technology and is realized using micromachining processes. The complete device is composed of two parts, one is a micro virtual impactor for the classification of particles according to their sizes...
This paper presents the perfect matched-mode operation of a type I non-degenerate z-axis tuning-fork gyroscope (i.e., 0 Hz frequency split between high-Q drive and sense modes). The matched-mode tuning fork gyroscope (M2-TFG) is fabricated on 50-µ m thick SOI substrate and displays an overall rate sensitivity of 24.2 mV/º/s. Allan Variance analysis of the mode-matched device demonstrates an angle...
This paper presents a new, high-performance SOI-MEMS gyroscope with decoupled oscillation modes. The gyroscope structure allows to achieve matched-resonance-frequencies, large drive-mode oscillation amplitude, high sense-mode quality factor, and low mechanical crosstalk, demonstrating a measured noise-equivalent rate of 90 (deg/hr)/Hz1/2even at atmospheric pressure. The angular rate sensitivity of...
A novel self-magnetic excitation mechanism for resonant microsensors vibrating in a rotational in-plane mode is presented. The excitation scheme is based on magnetic forces acting between two current carrying conductors and requires no external magnetic field. In combination with piezoresistive detection elements, the magnetic driving scheme has been applied to disk-shape microresonators. With 10...
This paper introduces a new resonant mass sensor that is based on a lateral extensional mode (LEM) piezoelectric resonator, and has a minimum detectable mass (MDM) of 10-15g in air at room temperature. The resonator with size of about 200×50×1 μm3has a quality factor (Q) of > 1,400 at 60MHz, and as small as 0.1ppm shift of its resonant frequency can be detected. The 0.1ppm detection capability...
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