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A comparative study of computation models for predicting the vibration modes of some MEMS structures of cantilever type — as suspension arms of the inertial mass of a bulk-micromachined silicon accelerometer, reported to the experimentally measured values of resonance (natural) frequencies, is presented in this paper. The most appropriate values of silicon Young's modulus depending on the crystal...
The paper deals with studying the mechanical structure of a bulk-micromachined silicon piezoresistive accelerometer by using FEM (Finite Element Method). The vibration modes (resonant frequencies) and sensitivity were predicted. The results of numerical simulation, validated experimentally have pointed out the influence of manufacturing process parameters on the accelerometer performance.
This paper deals with, the manufacturing technology by silicon bulk micromachining for a MEMS accelerometer with piezoresistive detection as well as the vibration testing of the acce-lerometer structure by using the MSA-500 Micro System Analyzer, a measurement instrument for analysis and visualization of structural vibrations and surface topography in microstructures such as MEMS devices. The technological...
A method to etch cantilever beams oriented in the <100> direction on (100) silicon wafers is presented. Backetching of the wafer, heavily doped boron etch stop, or anodic oxidation etch stop are not necessary. The method requires only two levels of masking and uses silicon dioxide as passivation material. Two techniques that offer information about the surface topography, SEM (scanning electron...
The paper points out the advantages of the spray etching method and presents the construction data of an original laboratory etching equipment. The equipment performs optimal working parameters: chemical attack from both sides of the piece, flow and temperature controlling of the etchant solution, low lateral etching, high productivity and great fineness of processing. There are also presented the...
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