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The Frequency Tracking Oscillator (FTO) is being more and more used to drive vibrating MEMS sensors resonators (inertial sensors and mass sensors) because of its ability to control the phase shift over the resonator and thus to track the resonance frequency. The goal of this work is to study the FTO phase noise that determines the sensor resolution. First a phase noise model of the FTO is presented,...
Condition monitoring is used to increase machinery availability and machinery performance, reducing consequential damage, increasing machine life, reducing spare parts inventories, and reducing breakdown maintenance. An efficient real time vibration measurement and analysis instruments is capable of providing warning and predicting faults at early stages. In this paper, a new methodology for the implementation...
A novel on-line monitoring technique for integrated MEMS is presented based on injection of an electrical test stimulus into the bias structure through both superposition or modulation. The techniques “bias superposition and bias modulation” both support integrated structural test that targets both production test and on-line condition monitoring through generation of dependability metric. It can...
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