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We describe optical and topographic imaging using a light emitting diode (LED) monolithically integrated on a silicon probe tip for Near-field Scanning Optical Microscopy (NSOM). The light emission resulted from a silicon dioxide layer buried between a phosphorus-doped N+ silicon layer and a gallium-doped P+ silicon region created locally at the tip by a focused ion beam (FIB). The tip was employed...
We have fabricated a silicon microprobe integrated with a nanometer-sized light emitting diode (Nano-LED) on the tip. This paper describes the fabrication procedure and preliminary topographic testing results. The silicon probe with electrode pattern was made by wet-etching a silicon-on-insulator wafer using oxide as the mask. Subsequently, the probe tip was cut using a focused ion beam (FIB) to form...
We have fabricated a MEMS microprobe integrated with a nanometer-sized light emitting diode (LED) on the tip for near-field scanning optical microscopy (NSOM). The probe body and the LED electrodes were made by wet-etching and focused ion beam(FIB) cutting of an SOI wafer. Semiconductor nanoparticles (CdSe/ZnS core-shell nanoparticles) were electrostatically trapped and excited within an electrode...
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