2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) > 743 - 746
Source
Abstract
Identifiers
book ISSN : | 1084-6999 |
book ISBN : | 978-1-4244-0950-1 |
book e-ISBN : | 978-1-4244-095-5 |
DOI | 10.1109/MEMSYS.2007.4433129 |
book ISSN : | 1084-6999 |
book ISBN : | 978-1-4244-0950-1 |
book e-ISBN : | 978-1-4244-095-5 |
DOI | 10.1109/MEMSYS.2007.4433129 |