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The Line Impedance Stabilization Network (LISN) is mostly used in electromagnetic compatibility for conducted and radiated radio-frequency emission and susceptibility tests. The input impedance is one of the most important parameters in LISN calibration. To measure the input impedance, an adapter is required to connect the Vector Network Analyzer (VNA) to the Equipment Under Test (EUT) port of the...
This work explores MEMS (Micro-Electro-Mechanical Systems) potentialities to fabricate AC voltage references through mechanical–electrical transduction that could be used for high precision electrical metrology and for applications in miniaturized instrumentation. AC voltage reference ranging from 5V to 90V have been designed and fabricated using the same Epitaxial Silicon On Insulator (SOI) surface...
This paper present results of work undertaken for exploring MEMS capabilities to fabricate AC voltage references for electrical metrology and high precision instrumentation through the mechanical-electrical coupling in MEMS devices. Several first devices have been designed and fabricated using a Silicon On Insulator (SOI) Surface Micromachining process. The measured MEMS AC voltage reference values...
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