The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
This paper presents an electrostatic mechanism for tuning the temperature coefficient of frequency (TCf) of disk-shaped resonators fabricated in highly doped (100) single-crystalline silicon. Taking advantage of the degenerate nature of “wineglass” mode resonators such as rings and disks, we show that rotating the resonant mode shapes by electrostatically changing the boundary conditions can effectively...
We present an epitaxially-encapsulated 2×2mm2 quad-mass resonator (QMR) with shaped comb fingers for frequency tuning. While shaped electrodes have been used for frequency tuning of linear resonators, the device studied here has very high quality factor (g=100,000) resulting in a very narrowband resonance which, without the shaped electrodes, results in undesirable nonlinear behavior such as amplitude-frequency...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.