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This paper presents a new roller-based nano-imprinting method based on the Infrared assisted metal transfer technique. It utilizes a silicon mold which is deposited with a thin metal film for pattern transferring. Another metal film which acts as an adhesion layer is also deposited on the substrate surface. An infrared light source incident from the substrate side heats up the metal films. After imprinting,...
In this paper, two types of contact-printing methods for micro/nano-lithography are developed and their application on fabricating high-frequency surface acoustic wave (SAW) devices are investigated. First of all, a light-assisted metal film patterning (LAMP) method which transfers a patterned metal film directly from a silicon mold to a substrate is discussed. The pattern transformation relies on...
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