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In this study, an analytical calculation was performed by using the Navier-Stokes equation for Newtonian fluids to investigate influences of acoustic radiation and viscous damping on the frequency and quality factor of piezoelectric circular microdiaphragms (PCM). Theoretical model shows that the ratio of contribution of viscosity over acoustic radiation term on the frequency shift of PCM mainly depends...
Pressure influences on the vibration characteristics of piezoelectric circular microdiaphragm based pressure sensors are investigated theoretically and experimentally. It was demonstrated that only Bessel function of zero order, m=0, participates in the vibration modes of the microdiaphragm symmetrically loaded by pressure. The piezoelectric circular microdiaphragm was fabricated by combining sol–gel...
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