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A MEMS electret generator for energy harvesting applications has been developed and its performance is examined in a series of experiments. In addition, an autonomous wireless sensor powered by the electret generator combined with a microwave wireless power transmission is proposed for the space transmission system.
A complete electromechanical model of vibration-driven micro electret power generators has been developed, and its characteristics are directly compared with experimental data to verify the model. Nonlinear power management circuit for rectification and impedance conversion is also assumed. It is found that the electrostatic damping force acting on the seismic mass is dependent on the external circuit...
This paper presents an alternating magnetic-field generator at 20 kHz for biological research using a single phase inverter and a series LC resonant circuit. Both single coil and multiple coil magnetic-field generators are designed and their effectiveness is confirmed by analytical and experimental results. These results demonstrate that the magnetic-field generator can produce 8 mT at a frequency...
A vibration-driven electret generator has been developed for energy harvesting applications. By using parylene as the spring material, a low-resonant-frequency MEMS generator is realized. Electrostatic levitation is adopted for the gap control. Large in-plane amplitude of 0.5 mm at the resonant frequency as low as 21 Hz has been achieved. We also demonstrate electret-powered operation of LED using...
A vibration-driven electret generator has been developed for energy harvesting applications. Perfluorinated polymer electret with extremely-high surface charge density is employed for large power output. By using parylene as the spring material, a low-resonant-frequency MEMS generator is realized. Large in-plane amplitude of 0.8 mm at the resonant frequency as low as 37 Hz has been achieved. With...
Vibration-driven electret generator has been developed with the aid of MEMS technologies. Parylene high-aspect-ratio spring is successfully microfabricated to support an in-plane seismic mass. Resonant frequency as low as 37Hz has been achieved with a large in-plane amplitude of 1 mm. With our early prototype, we have obtained 21 Vp-p voltage output.
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