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Micro sensors and actuators are widely used in this era. Micro pressure sensors are required in many applications and are the first sensors fabricated using MEMS technology. The work presents the fabrication of two micro pressure sensors viz., polysilicon on insulator (PolySOI) and amorphous silicon on insulator (a-SOI). Both sensors work on the principle of piezoresistive pressure sensing. The PolySOI...
Every organism emits energy around it which comprises UV-radiation, EM-radiation, infrared and thermal radiation. This energy around human body represents health condition of the subject under study. These energy fields are called as aura of the body under consideration. Several types of equipments are there to capture such energy. Kirlian camera captures the distribution of energy radiation around...
This paper involves the study of pull-in voltage of a Shape Memory Alloy (SMA) based cantilever beam. The study is carried out by applying electrostatic forces and varying the dimensions. Nitinol which is a SMA is used for the simulation to get required results. An electrostatic force generated by an applied voltage between the top movable micro-cantilever and fixed ground plane bends the micro-cantilever...
Amongst MEMS technology, pressure measuring technology is one of the most important parameter, which is measure of force per unit area. In this work a comparative analysis of different pressure sensor mechanisms is carried out. Capacitive pressure sensors work on the principle of electrostatic transduction mechanism, piezoresistive pressure sensor employs a change in resistance values of piezoresistive...
The objective of this work is to model and simulate micro electromagnetic actuator driven by the electric current in the coil. The process of generating a magnetic flux (and hence force) by means of current flowing through the coil can be called as electromagnetic excitation. A cantilever beam kept at the sides of the coil gets deflected because of this force and can act as electromagnetic actuator...
In this work, we present the design, simulation and analysis of piezoresistive micro pressure sensor operable at pressure range of 0 to 1MPa. Piezoresistors are placed and are connected in the form of Wheatstone Bridge, on the diaphragm. For the design and simulation various aspects like diaphragm dimensions, placement of piezoresistors, dimensions of piezoresistors and different shapes of piezoresistors...
Amongst various transduction principles of pressure sensor, piezoresistive method provides high sensitivity and linear operation over a wide range of pressure. In this paper, piezorestive transduction mechanism is employed for design of a pressure sensor. The diaphragm of the proposed sensor is designed using n-type of Si with copper material used as a connecting arms for the p-type meander shaped...
Piezoresistive pressure sensor is a significant transduction mechanism for measuring pressure due to the fact that it is simpler to integrate with electronics, its response is more linear, they are inherently shielded from RF noise and fabrication is easy compared to other transduction mechanism. In this paper, piezoresistive transduction mechanism is employed for design of a pressure sensor. The...
Micro cantilevers are the basic MEMS structures, which can be used both as sensors and actuators. The actuation principle of micro cantilever is based on the measurement of change in cantilever position as result of applied stimulus. The objective of this work is to study concept of pull-in voltage and how to reduce the same. The proposed work is carried out by using Comsol/Multiphysics softwere which...
Use of polymer material in manufacturing of microstructures has been a trend in recent MEMS technology. One such trend is employed in this paper where in four different micro structures are designed and simulated using SU8 polymer material. All the architectures are simulated using COMSOL Multi physics to compute modal frequency. The simulation results are verified analytically using a standard mathematical...
This paper presents a unique design of MEMS based 4-bit shift register that perform shifting operation same as logic devices that are composed of solid-state transistors. The MEMS shift register design inherits all the advantages from MEMS switches and thus is expected to have more applications. One unique feature of this device is that it can perform all types of shifting mechanisms, but with different...
This paper discusses few geometrical design issues to reduce the actuation voltage of series MEMS switch. It presents the design of RF-MEMS series cantilever based switch with pull-down electrodes using parallel capacitance between beam and pull down electrode. The switch structure is composed of aluminum material. Minimum actuation voltage achieved is 8 Volts. The simulation of the switch is carried...
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