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A tunable surface plasmonic resonance (SPR) driven by microelectromechanical system (MEMS) is designed in this work. Pitch tuning of SPR structures on elastomer filters various transmission of electromagnetic (EM) spectra. A color filter based on SPR in the visible range is proposed and evaluated at various strains induced by the MEMS operation before quantified by figure of merit. Distinguishable...
In this work, a high-performance mass sensor utilizing CMOS-MEMS thermal-piezoresistive resonator (TPR) sustained by an instrumental Lock-in and PLL circuit for oscillation is demonstrated. Under a low dc power consumption of the device with only 1.75 mW, the motional transconductance (gm) of the proposed TPR reaches record-high values both in vacuum (118.4 μA/V) and air (16.96 μA/V) among all reported...
This paper reports a combinational near infrared (NIR) and intense pulse light (IPL) sintering method for enhancing the surface morphology of metal mesh printed in organic light emitting diodes (OLEDs). This roll-to-roll process-supportive NIR and IPL sintering improved the as-printed surface roughness by 60.5%, implying improved OLED stability and reliability. In addition to surface roughness, structural...
Unlike conventional four-capacitor tactile sensors, this work presents a two-capacitor arrangement to reduce the size of sensing unit and to enhance the spatial resolution without losing sensitivity and accuracy. The shapes of the capacitors were simultaneously modified from squares to rectangles to realize balanced spatial resolutions in the x- and y-direction. Experiments showed identical results...
To resolve the issue in detecting sidewall crack defect mode in the die singulation of copper/low-k wafer after laser pre-groove/cleaning process, we combine a dedicated optical system with automatic optical inspection system in the production line for the nondestructive wafer-by-wafer optical inspection system to inspect the dicing street quality of copper/low-k wafer. Experiment shows that the sidewall...
This paper reports an up to 95.9% angle detection accuracy enhancement for capacitive tactile sensors, which entails asymmetric and intentionally shifted electrodes. The rotational shift between two electrodes of a capacitor that greatly contributed to angle detection errors was theoretically analyzed and examined by experiments with simulations. The asymmetric electrodes containing one fan- and one...
This study provides detail study of the metal crack initiation on a polymer substrate under stress. Complete simulation models with variables such as metal pitch and metal materials were performed, which successfully predicted the optical behavior changes when the metal was made periodically as an optical polarizer.
This paper proposed an ultraviolet (UV) nanoimprinting process for transferring various macro/nano-scales patterns from a silicon mold to a polyethylene terephthalate (PET) substrate. Both finite element method (FEM) simulation and experiment were conducted to investigate the formation of patterns. A FEM model of periodic nanostructures with prescribed boundary conditions was first established. Then,...
In this work, we propose a novel capacitance tactile sensor with flexibility and transparency using polydimethylsiloxane (PDMS), polyethylene terephthalate (PET), and indium tin oxide (ITO) for based materials. This sensor can measure normal force and shear force simultaneously. Each capacitance sensor cell consists six layers and includes four capacitors. When a normal force is applied on the bump,...
A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton's rings' size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw...
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