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A small but persistent signal in wafer slot order was observed at functional test, affecting logic yield. Through wafer slot Randomization at several operations in the route a process step within high-k metal gate formation was suspected to be causing the degrade, but conventional approaches did not reveal the root cause. By combining datamining with a thorough analysis of sector and electrical data...
A small but persistent signal in wafer slot order was observed at functional test, affecting logic yield. Through wafer slot Randomization at several operations in the route a process step within high-k metal gate formation was suspected to be causing the degrade, but conventional approaches did not reveal the root cause. By combining datamining with a thorough analysis of sector and electrical data...
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