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A signal conditioning circuit with ultra-high sensitivity and ultra-low power consumption is presented for the capacitive and voltage mode microelectromechanical systems (MEMS) transducers. Two different amplifiers are chopped with two different frequencies to remove their flicker noise. A low voltage high current amplifier is implemented in the 1st stage, which improves the power consumption and...
A wide voltage range charge pump is designed in 0.13 μm CMOS technology to provide biasing voltages for MEMS resonators. The pump provides an output range of 32.6 V, from −16.1 V up to 16.5 V, by using four different charge pump cells based on cross-coupled voltage doublers. Two cascaded negative charge pumps and two cascaded positive charge pumps with enhancements to breakdown and high voltage tolerance...
The design of low-noise low-power dual chopper amplifiers (DCAs) for sensors is investigated. The DCA minimizes the power consumption and noise by chopping the signals at two frequencies. The functionality of the single and dual chopper amplifiers, including noise and optimized power consumption are presented. DCA performance with respect to power, noise and power-noise product is compared with that...
This paper presents a Verilog-A model of a mi-croelectromechanical systems (MEMS) clamped-clamped beam resonator. The model captures the electrical and mechanical non-linear effects, and accounts for the spring softening and Duffing behavior present in resonators at high drive levels. A transimpedance amplifier is designed in 0.13μm CMOS to implement and simulate a MEMS-based oscillator incorporating...
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