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Piezoelectric micromachined ultrasonic transducer (pMUT) gains increasing interests from researchers. It overcomes the inherent shortcomings of conventional bulk ultrasonic transducers such as acoustic impedance mismatching. In addition, pMUT does not require the extremely large input voltage as capacitive micromachined ultrasonic transducer (cMUT), which is potential to be integrated into portable...
In this paper, we present a novel sensor array manufacturing process that involves transfer printing methods using adhesive rubber stamps mounted on a chip mounter. By using these methods, not only ultrathin microsensors but also microcontroller and amplifier chips required for the fabrication of sensor devices can be mounted. We successfully transfer-printed a very fragile 5-mm-long, 1-mm-wide, 5μm-thick...
We proposed a thin piezoelectric cantilever to measure an airflow velocity change. An airflow sensor using a PZT cantilever and a flow channel was fabricated. We measured the relationship between the airflow velocity change and the piezoelectric voltage of the cantilever. The dimensions of the sensor and the cantilever are 25 mm × 20 mm × 20 mm and 1500 μm × 1000 μm × 2 μm respectively. We evaluated...
The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 µm × 1000 µm × 2 µm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The...
A novel actuation mechanism for a gold-coated MEMS mirror driven by 1×10 piezoelectric Pb(Zr, Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for 2-D raster scanning applications.
A non-drive, non-contact MEMS DC electric current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord has been proposed. A micro magnet is integrated into the MEMS-scale DC sensor and the appropriate position for locating the micro magnet has been theoretically pinpointed. A macro-scale prototype DC sensor...
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