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Advanced process control (APC), which includes run-to-run (R2R) process control and fault detection and classification (FDC) is pervasive in fabs today. While APC provides many benefits, it also presents many implementation and operational challenges including significant up-front configuration cost, lack of solution accuracy resulting in false/missed alarms, and lack of a consistent capability for...
In today's competitive semiconductor manufacturing environment, improving fab productivity and reducing cost requires that all systems work collaboratively towards production, quality and cost targets. Equipment engineering systems (EES), including advanced process control have risen to the top as key enablers for maximizing fab productivity, however these systems have been hindered as they focus...
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