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This paper presents the first demonstration of a new class of phononic band gap (PBG) structures in air/aluminum nitride (AlN) at 1 GHz for symmetric lamb waves. The unit cell of this design utilizes an X-shaped air inclusion, instead of the conventional circular ones, in a solid host material. This novel design extends the operating frequency of the AlN PBG to the GHz range by using a structure minimum...
This paper reports on the first demonstration of a 457 MHz AlN Piezolectric Resonant Nanochannel (PRN) for bio-sensing applications in liquid environment. A novel process consisting of 7 lithographic steps was developed to fabricate the PRN. The new resonant device shows an unchanged value of the electromechanical coupling, kt2 (about 0.8 %), whether the channel is filled with air or water and a quality...
This paper reports on a new class of nanoscaled piezoelectric aluminum nitride contour-mode resonant sensors (CMR-S) that have been developed for the gravimetric detection of volatile organic chemicals (VOC). The use of the CMR-S and its scaling for the making of large arrays of detectors is justified in terms of the superior sensitivity and limit of detection (LOD~zg/μm2) that this technology...
This paper reports, for the first time, on the design and demonstration of two novel electrode configurations in dual-layer stacked Aluminum Nitride (AlN) piezoelectric contour-mode resonators to obtain low filter termination resistance (down to 300 ??, which also results in better filter out-of-band rejection) and reduced insertion loss (IL as low as 1.6 dB) in multi-frequency (100 MHz - 1 GHz) AlN...
This article summarizes the most recent technological developments in the realization of integrated aluminum nitride (AlN) piezoelectric microelectromechanical system (MEMS) for radio frequency (rf) front ends to be employed in next generation wireless communication devices. The AlN-based resonator and switch technologies are presented, their principle of operation explained, and some key experimental...
AlN contour-mode vibrating RF MEMS resonator technology is described as capable of low-loss filtering and frequency synthesis for next generation wireless devices. Contour-mode piezoelectric resonators can span frequencies from 10 MHz up to few GHz on the same silicon chip offering high quality factors in air (1,000-4,000) and low motional resistance (25-700 Omega). Low loss (<- 1.5 dB) electrically...
AlN contour-mode vibrating RF MEMS resonator technology is described as capable of low-loss filtering and frequency synthesis for next generation wireless devices. Contour-mode piezoelectric resonators can span frequencies from 10 MHz up to few GHz on the same silicon chip offering high quality factors in air (1,000-4,000) and low motional resistance (25-700 Omega). Low loss (<- 1.5 dB) electrically...
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