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We propose a high power-output vibrational energy harvesting based on ionic liquid. Ionic liquid enables very large capacitance (1.0–10 µF cm−2) on the electrode at bias voltage less than 1.9 V due to its extremely thin (∼ 1 nm) electrical double layer. By mechanical squeezing and drawing the ionic liquid, that was solidified with a polymer additive, between a pair of electrodes at 15 Hz, we stably...
A spontaneous oscillation due to charging effect in an RF MEMS switch was investigated. When an RF MEMS switch opens from its contact mode, a nano-scale gap is formed and the charges accumulate between the movable and fixed electrodes, which cause a strong attractive force in the gap. The attractive force draws the electrodes to contact each other again, thus the charges are neutralized. As the charges...
A successful approach to drastically reduce or even completely eliminate friction and wear in scanning force microscopy is the use of electrostatic modulation of the normal force acting on the tip-sample contact. In this paper we have devised, fabricated and experimentally characterized a novel electrostatically actuated AFM probe. The probe consists of a flexible cantilever that has an electrostatic...
A novel trench-type anti-wear microprobe with nano-scale electric contacts was proposed as an AFM probe to overcome the problem of probe tip wear and improve patterning stability in Atomic force microscope (AFM) local anodic oxidation (LAO) lithography. The proposed microprobe was fabricated using MEMS technique. The patterning and wear properties of the fabricated microprobe in AFM LAO lithography...
This paper deals with the stability for nonlinear teleoperation with time varying communication delays. The proposed method is passivity-based controllers with time varying gains which depend on the rate of change of time varying delay. In our proposed method, stability condition is independent of the magnitude of the communication delay and the damping of the system. The delay-independent stability...
Linear Brownian motors utilize relatively weak electric fields to bias the diffusion of particles in a microfluidic channel thereby harnessing Brownian motion to facilitate particle transport. We present a custom simulator for such a system and use it to optimize transport by modifying the electrode configuration and rectification scheme. With insight gained from simulation, we are able to identify...
This study presents a newly developed dynamic model established by MATLAB Simulink that can handle post pull-in behavior of MEMS electrostatic torsional mirror. In addition to the conventional MATLAB Simulink model of the quadratic oscillation system, a mathematical model of displacement limiter has been inserted to represent the pull-in effect in dynamic analysis. Due to the modification, the model...
Molecular biophysicists seek to understand how biological systems work through mechanical or electrical characterizations performed at the molecular scale. From this perspective, we have devised a silicon-based micromechanical tool for stress-strain measurements of molecular fibers and demonstrated micro manipulation and biomechanical characterization of DNA bundles in a liquid solution. By combining...
A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton's rings' size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw...
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