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Reliability assessment is a key step in ensuring the quality of a product. As semiconductor technology continues to evolve, the reliability test process also complicates, involving engineers and technical assistants responsible for different test tasks. In this paper, we propose a design of a comprehensive Reliability Management and Index System that integrates online test requests, database management...
In this paper, we study on Overlay (OVL) control method for inline OVL measurement. In semi conduct manufacturing industry, Lithography (Litho) OVL is defined as the positional accuracy, a criteria parameter and to detect possible inline nonconformance from recipe and equipment shifts [1]. Generally, most control limit setting are based on the engineering judgment, tolerance about 1/3 critical dimension,...
In ISO/TS16949 international standard, process audit is a mandatory system requirement, to confirm the effectiveness of the manufacturing process. But the standard doesn't clearly indicate the specific sampling size. The sampling quantity is often judged by personal experience during the audit, which may lead to discrepancy when choosing the sampling size, which further leading to audit result difference...
This paper introduces a guidance, which is displayed by a flow chart, for the process reliability data comparison of advanced semiconductor technologies. The present semiconductor manufacturing process is very complex and its quality control requirement also becomes more and more strict. Different reliability data may analyzed by different methods considering both engineering and statistical evidence...
Acceptance sampling has been widely used as a quality control technique in industry. A standard single sampling plan consists of 3 switchable inspection plans: Tightened, Normal and Reduced [1]. It means the 3 inspection schemes can be switched from one to another based on predetermined successive products' quality. Theoretically, higher quality of successive lots or batches has high probability of...
In this paper, we introduce a data comparison method, Matching Rule (MR). By setting up a relation between MR and F/T, an empirical criterion of MR for comparing two groups of data is defined. It is based on a study on the classical statistic method “Hypothesis test — F/T”. The F/T test is widely used to compare variations & means of two normal populations. However, the empirical criteria of MR...
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