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In this study, we have developed a basic system of an ingestible core body thermometer powered by a gastric acid battery. A custom integrated circuit (IC) with voltage boosting, coding, modulating and transmitting functions was prototyped. A small gastric acid battery based on a pair of Mg and Pt thin-film electrodes was also fabricated by microfabrication technology. Charge storage in a storage capacitor...
In this study, we successfully developed a high signal-to-noise ratio (SNR) rangefinder based on a piezoelectric micromachined ultrasonic transducer (pMUT). A monocrystalline Pb(Mn1/3, Nb2/3)O3-Pb(Zr, Ti)O3 (PMnN-PZT) thin film was used because it has large figures-of-merit (FOM) for SNR due to its high piezoelectric coefficient and small relative permittivity (typical values: e31,f = −14 C/m2, εr...
Present advanced-process for the fabrication of through silicon via (TSV) with highly phosphorus-doped n++-polycrystalline Si plugs for driving an active-matrix nanocrystalline Si (nc-Si) electron emitter array was described. The resistance per one TSV was measured to be 150 Ω, and voltage drop at the TSV plug in a normal driving operation was sufficiently small to apply the diode current to the nc-Si...
A large figure-of-merit (FOM) piezoelectric transducer has been developed based on a Pb(Mn,Nb)O3-Pb(Zr,Ti)O3 (PMnN-PZT) epitaxial thin film on a Si substrate for MEMS (Micro Electro Mechanical Systems) sensors such as vibratory gyroscopes. A c-axis oriented PMnN-PZT thin film was epitaxially grown on a Si substrate covered with buffer layers by sputter deposition with fast cooling. This film has excellent...
We have successfully obtained a highly c-axis oriented epitaxial Pb(Zr, Ti)O3 (PZT) based thin film, 0.06Pb(Mn1/3, Nb2/3)O3-0.94Pb(Zr0.5, Ti0.5)O3 (PMnN-PZT), on a (100) Si substrate by fast cooling of the substrate just after sputter deposition. The Si substrates were covered with SrRuO3//La0.5Sr0.5CoO3//CeO2//yttria-stabilized zirconia buffer layers. It is found that c-axis orientation ratio of...
This paper reports a complementary metal oxide semiconductor (CMOS)-based 20×20 amperometric biosensor array using boron-doped diamond (BDD) microelectrodes with excellent electrochemical properties. The BDD electrodes were once formed on a Si wafer at 800°C, and then transferred to a 0.18 μm CMOS wafer with a benzocyclobutene (BCB) bonding interlayer. As a result, the BDD microelectrodes were arrayed...
This paper mainly reports the process development of a Pierce-type nanocrystalline Si (nc-Si) electron emitter array for massively parallel electron beam (EB) lithography based on active-matrix operation using a large-scaled integrated circuit (LSI). The emitter array consists of 100×100 hemispherical emitters formed by isotropic wet etching of Si. EB resist patterning was demonstrated by 1:1 projection...
This study reports on the usability of ultraviolet (UV)-assisted ozone steam etching for SU-8 removal in micromolding process. SU-8 is etched at a rate greater than 100 nm/min by intermittently rotating a substrate on a spinner with UV irradiation to spin out etching products. Its complete removability was also verified by analyzing the substrate surface after the ozone steam etching of SU-8 via scanning...
In this study, we have proposed a novel laterally driven piezoelectric MEMS (MicroElectro Mechanical Systems) switch using a high-aspect-ratio (AR) PZT (Pb[ZrxTi1−x]O3) structure. Then, the fabrication process of the PZT structure based on PZT filling process in a deep Si trench is developed to realize a laterally driven PZT microactuator. At first, the process of the Si trench with a thin Al2O3 layer...
This paper describes gaze guidance with emotional motion of a head robot, called Kamin-FA1. We propose to use not only the gaze control of the robot but also the facial expression combining with the head motion to guide a human being's gaze to the target. We provide the information of the gaze target intuitively to human based on the shared attention with the emotional communication robot Kamin-FA1...
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