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We present a comprehensive study of electro-optical frequency mapping (EOFM) and probing (EOP) on NAND and NAND-like structures with different sizes. Our main objective was to find out, if it is possible to detect single dysfunctional transistors in a NAND structure smaller than the laser spot just by means of the optical signal. We further investigate the impact of parasitic laser voltage signals...
The increasing number of interconnection layers is making failure analysis of integrated circuits (ICs) increasingly complex. In addition, the decreasing supply voltage is a challenge for failure analysis equipment, as minimum detection levels are reached. Laser voltage probing (LVP) is a common method for probing internal nodes through the silicon back side, and is particularly suited to low-voltage...
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