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Opto- and electromechanical systems have separately shown great progress in reaching ultrasensitive displacement readout and manipulation of nano- and micromechanical resonators at the quantum level [1,2,3]. Besides that, combining optical and electrical degrees of freedom via a mechanical interface is of potential interest, as it would allow for low noise optical detection and laser cooling of weak...
In this work we present the development of a new set-up that allows on-wafer sensitivity characterization of piezoresistive cantilevers. In this way we reduce considerably the testing time compared to the techniques available up to date but at the same time we maintain a high measurement precision. Moreover it can be easily used for characterization of broad types of batch fabricated micro- and nanoelectromechanical...
We present a novel approach for hydrogen gas detection, based on palladium-coated micromechanical resonators. A sequence of thin film techniques allows the large-scale parallel fabrication of free-standing beams, from a counter-electrode by a mesoscopic air gap. The readout principle has been confirmed. The device manifests a resonance frequency drop from 6.5 to 3 MHz as it is exposed to 4 % of H2...
We present the fabrication and the testing of self sensing submicron thick piezoresistive cantilevers. Two kind of piezoresistive transducers (piezoresistor and MOSFET transistor) are integrated into the cantilever in the (100) direction, by n-type implantation (As). Cantilevers with both types of transducers are successfully fabricated, showing a yield of 100% and a standard deviation in the electrical...
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