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This paper introduces a new approach to investigate polymer sorption kinetics by weighing the polymer films using micromachined in-plane resonators. A custom gas-testing setup enables fast analyte concentration changes, which are necessary to study analyte diffusion into thin polymer coatings deposited on top of the microresonators. Short-term frequency stabilities of the microresonators in the 10...
This paper presents a chemical microsystem based on the integration of a silicon-based resonant microsensor and a CMOS ASIC for portable sensing applications in air. Cantilever-based microresonators coated with chemically-sensitive polymer films are used as microsensors. The CMOS ASIC utilizes the self-oscillation method, which uses an amplifying feedback loop. For improved short- and long-term frequency...
The successful compensation of frequency drift in a mass-sensitive chemical microsensor is demonstrated. The proposed compensation method uses a periodic stiffness modulation, generated by a second feedback loop, to monitor the microresonator's quality factor (Q-factor). The Q-factor is solely obtained from frequency measurements and monitored along with the measurand-induced frequency shift during...
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