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Micromachining of micro electromechanical systems such as other fabrication processes has inherent variation that leads to uncertain dimensional and material properties. Methods for optimization under uncertainty analysis can be used to reduce micro device sensitivity to these uncertainties in order to create a more robust design, thereby increasing reliability and yield. In this paper, approaches...
In this paper, the effect of material and dimensional uncertainties on performance of electrothermal microactuator is investigated. A simple and efficient uncertainty analysis method is used based on direct linearization method; also uncertainty analysis is performed by creating second-order metamodel through Box-Behnken design and Monte Carlo simulation. The results demonstrate how these uncertainties...
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