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In this paper, we report the effect of acetylene (C2H2) flow rates (5 to 20 sccm) on the compositional and structural variations of nitrogen doped amorphous carbon (a-C:N) thin films grown by surface-wave mode microwave plasma chemical vapor deposition at low temperature (≪100 °C). Argon was used as the main plasma source gas. The films were characterized by X-ray photoelectron spectroscopy (XPS),...