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The objective of this study has been to investigate the effect of annealing of multi crystalline edge wafers and Cz mono crystalline wafers based on metallurgically refined silicon. Sets of neighboring wafers have been annealed at different temperatures and compared with as cut wafers as well as P-gettered wafers. The wafers have been characterized by μ-PCD, QSSPC, FeB-pair splitting and SIMS. The...