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Among RF-MEMS layouts currently used for designing microswitches, microresonators and varactors, cantilever and double clamped microbeams are widely applied in industrial applications. After a consistent modelling activity which defined suitable numerical approaches to study the static behaviour of such microdevices, authors investigate here the problem of nonlinear electromechanical coupled non-symmetric...
Microcantilever specimens for in-plane and out-of-plane bending tests are here analyzed. Experimental validation of 2D and 3D numerical models is performed. Main features of in-plane and out-of-plane layouts are then discussed. Effectiveness of plane models to predict pull-in in presence of geometric nonlinearity due to a large tip displacement and initial curvature of microbeam is investigated. The...
In this paper an experimental validation of numerical approaches aimed to predict the coupled behaviour of microbeams for out-of-plane bending tests is performed. This work completes a previous investigation concerning in plane microbeams bending.
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