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Summary form only given. Ion energy and angular distributions (IEADs) to particles suspended in plasmas is of interest from many perspectives. In low pressure plasmas, ion drag forces are important to the particles' transport and depend on the IEADs, as do particle heating rates. In atmospheric pressure plasmas, particles may be of the form of bacteria, and so the energy delivered by the IEADs in...
Summary form only given. The need to reduce consumption of fossil fuels and a transition into an economy less dependent on hydrocarbons is urgently necessary. On this quest to find alternative energy sources, one proposed solution is to use another secondary energy source besides electricity - hydrogen. Hydrogen as an energy carrier can fulfill a portion of the energy demand, particularly in the transportation...
Summary form only given. Fluorocarbon plasmas are widely used in Si and SiO2 etching. The generally accepted mechanism includes:1 a) ion activation of sites to produce a SiCxFy or SiO2CxFy complex layer, b) deposition of CxFy polymer layer on top of the complex and c) etching the complex by releasing volatile etch products, such as COFx and SiFx. Since the ion energies typically used in dielectric...
In this talk, we discuss results from a modeling study of the effects of gap distance and material properties on plasma uniformity in DF-CCPs. A 2-dimensional Maxwell equation solver utilizing Finite Difference-Time Domain techniques, capable of resolving wave and electrostatic effects in arbitrary geometries was developed, and incorporated into the Hybrid Plasma Equipment Model. To capture the high...
Summary form only given. In order to reduce the RC time delay in integrated circuits, porous dielectric materials are used to lower the capacitance. Typical pore sizes are many nm with porosity of up to 50%. The porous low-k materials are typically SiOCH - silicon dioxide with carbon groups, principally CH3, lining the pores. These materials have pores open to the surface which are internally connected...
In this paper, we discuss results from direct simulation Monte Carlo (DSMC) modeling of hollow cathode magnetron (HCMs) for deposition of Cu. DSMC provides the possibility of an exact solution of Boltzmann's gas dynamic equation, and so should be applicable to lower pressures than conventional computational techniques. To obtain plasma source functions, electric potentials and magnetic fields, the...
The branching of streamers in atmospheric-pressure air, dense gases, and liquids is a common occurrence whose origins are likely found with many causes, both deterministic and stochastic. In this paper, we investigate the consequences of stochastic inhomogeneities on the propensity of branching of streamers in high-pressure gases.
Summary form only given. The surface energy and adhesion properties of commodity polymers such as polypropylene (PP) can be controlled by functionalization of the surface layers in plasmas. Affixing fluorine lowers surface energy and increases hydrophobicity. One such fluorination process is the immersion of PP sheets in a low pressure, capacitively coupled discharge sustained in F2 containing gas...
Summary form only given. Chemical oxygen-iodine lasers (COILs) achieve oscillation on the 2P1/2rarr2P3/2 transition of atomic iodine at 1.315 mum by a series of excitation transfers from O2(1Delta). In electrically excited COILs, (eCOILs) the O2(1Delta) is produced in a flowing plasma, typically He/O2, at a few to tens of Torr. Many svstem issues motivate operating eCOILs at higher pressures to obtain...
Summary form only given. The chemical oxygen-iodine laser operates on the 1.315 mum I(1P12) rarr I(2P32) transition in atomic iodine; and is pumped by reactions between O2(1Delta) and molecular and atomic iodine. In electrically excited COIL lasers, (eCOIL), O2(1Delta) is produced in a plasma followed by injection of I2 in the afterglow containing the excited oxygen. The flowing afterglow additionally...
Summary form only given. The development of robust processes for gate plasma etching to produce desired profiles and sidewall angles is critical to future technological nodes. The gradual decrease in equivalent gate oxide thickness at future technology nodes (les 100 nm node) has necessitated process control at the atomic level. To insure this level of control, it is desirable to use a self-limiting...
Summary form only given. Corona and dielectric barrier discharges operating at atmospheric pressure are often used to functionalize polymer surfaces. The generation and transport of plasma species (electrons, ions and radicals) close to the surface determines the rate of surface reactions that result in functionalization. Under conditions of forced gas flow in such discharges, the plasma dynamics...
Summary form only given. Uniformity and edge effects (the perturbation of features near the edge of the wafer) are of increasing concern in low pressure plasma processing. Edge effects are usually caused by perturbation of reactant and ion fluxes produced by wafer termination and matching to tool materials. Very often these perturbations result from subtle geometrical features, such as the spacing...
Summary form only given. Chemical oxygen-iodine lasers (COILs) achieve oscillation on the 2P1/2rarr2P3/2 transition of atomic iodine at 1.315 mum by a series of excitation transfers from O2(1Delta). In conventional COILs, O2(1Delta) is produced by liquid phase chemistry. In electrically excited COILs, (eCOILs) the O2(1Delta) is produced in a flowing plasma, typically He/O2, at a few to 10s torr. One...
Summary form only given. Microdischarges (MDs) having diameters of 100s of mum and operating with back pressures of 10 to 50 torr are being investigated for use as sources of thrust for small satellites. A typical design includes a pair of ring electrodes separated by 100s to 1000s mum embedded into high temperature compatible ceramic. A DC discharge is sustained between the electrodes producing a...
Summary form only given. The propagation of streamers in atmospheric pressure gases is of interest in plasma remediation of toxic gases, ozone production and functionalization of surfaces. The air (or other gases) in these non-pristine environments is often contaminated with particles or aerosols having sizes of 10s to 100s mum. These particles may have varying degrees of conductivity, from metallic...
Summary form only given. Pulsed atmospheric pressure plasma discharges, such as corona and dielectric barrier devices, are commonly used to functionalize surfaces (e.g., polymer sheets). The surfaces of these materials have surface roughness of 100s nm to 10s mum often resulting from the manufacturing process. For example, polypropylene surfaces consist of random assemblies of crystalline strands...
Summary form only given. Microdischarges having characteristic dimensions of 100s of mum at pressures of 10s to 100s of torr are being investigated for use as sources of thrust for small satellites. These devices are capable of generating up to mN of thrust using non-contaminating propellants such as rare gases or hydrogen. The class of device of interest includes cylindrical multistage discharges...
Summary form only given. The consequences of contamination of pulsed gas discharges by gas-phase particulates were studied theoretically. This study was performed with a multidimensional continuum model for a glow discharge sustained in rare gases in which a distribution of dust is specified. The continuum model integrates the conservation and transport equations for excited states and ions, while...
Summary form only given. The electron energy distribution (EED) in the ECR (electron cyclotron resonance) zone and the transfer of energy from the carrier gas to the working gases downstream are investigated. The EED was simulated using a Monte Carlo simulation capable of including nonresonant effects and arbitrary orientations of the magnetic and electric fields. Due to the high fractional ionizations...
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