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This paper reports on a novel CMOS-based high-density silicon microprobe array for intracortical recording applications. In contrast to existing systems, CMOS multiplexing units are integrated on the slender, needle-like probe shaft 160 mum in width. In the present implementation an unequaled number of 188 electrodes (diameter 20 mum, pitch 40 mum) are arranged in two columns along the 4-mm-long probe...
This paper reports a novel generation of CMOS stress mapping chips comprising 32 square field effect transistors (FET) with four source/drain contacts (piezo-FETs) exploiting the shear piezoresistive effect in n-type (NMOS) or p-type (PMOS) inversion layers. The sensor chips with a total die area of 2.5 times 2 mm2 are integrated with analog circuitry and digital logic. When exposed to homogenous...
This paper reports on the mechanical characterization of microtensile specimens made of silicon nitride (SiNx) thin-films with integrated 2D reflective gratings. By applying an axial force, the structures respond mechanically with an elongation and contraction in the longitudinal and transversal directions, respectively. The corresponding variations of both periods of the grating are monitored in...
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