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We have quantitatively investigated the suppression effect for the oxygen contamination into the InN layers by simultaneous irradiation of Ga beam during RF-MOMBE growth using the combination of the TMIn and the RF-plasma nitrogen sources. The O/C ratio and residual carrier concentrations decreased with increase in the Ga beam flux, and a linear relation was observed between O/C ratio and residual...
We have developed a new SiP (system in package) style optical MEMS (microelectromechanical system) component for fiber optic endoscope that operates without using external power supply. The endoscope sensor head (5 mm in outer diameter) attached at the end of an optical fiber is designed for the use of in vivo medical diagnosis such as gastrointestinal tact or vascular vein monitor by using an infrared...
We report a novel one-axis MEMS optical scanner with a scan-angle magnifying mechanism. Small actuator-motion was amplified through the two-mass-two-spring mechanism, and a large mirror angle was obtained
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