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The new assembly technology developed in this research provides a means to extend planar intracortical neural probes with one-dimensional (1D) and two-dimensional (2D) electrode arrangements into complex three-dimensional (3D) neural probes. The approach is based on novel silicon stacking modules realized using microsystems technologies. With these microcomponents, 3D probes can be assembled flexibly...
This paper reports on the design, fabrication and characterization of an innovative silicon-based neural probe with optical functionality. This so-called optrode is intended as an ultracompact tool for optogenetic applications in neuroscientific research. Beside platinum microe-lectrodes for electrical recording applications, bare laser diode (LD) chips combined with waveguides (WGs) implemented in...
This paper reports on the design and fabrication of a neural probe for simultaneous recording of neural activity and localized drug delivery. In comparison to common microfluidic probes, additional electrodes facing the fluidic channel are integrated in the polyimide-based membrane covering the microchannels. The novel fabrication process applies two-sided deep reactive ion etching (DRIE) of silicon...
Diffusion-limited deposition (DLD) allows the deposition of parylene C layers of two different thicknesses in one step with smooth transitions in between. Needlelike microelectrode structures for implantation in the brain were successfully coated with a taper along the needles' shafts. Diffusion limitation was obtained in the parylene coater by containers with perforated cover lids through which the...
Multi-electrode arrays for in vivo neural recording are presented incorporating the principle of electronic depth control, i.e. an electronic selection of electrode locations along the probe shaft independently for multiple channels. Two-dimensional (2D) arrays are realized using a commercial CMOS process for the electronic circuits combined with post-CMOS micromachining for shaping the probes and...
This paper reports on a novel CMOS-based high-density silicon microprobe array for intracortical recording applications. In contrast to existing systems, CMOS multiplexing units are integrated on the slender, needle-like probe shaft 160 mum in width. In the present implementation an unequaled number of 188 electrodes (diameter 20 mum, pitch 40 mum) are arranged in two columns along the 4-mm-long probe...
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