Serwis Infona wykorzystuje pliki cookies (ciasteczka). Są to wartości tekstowe, zapamiętywane przez przeglądarkę na urządzeniu użytkownika. Nasz serwis ma dostęp do tych wartości oraz wykorzystuje je do zapamiętania danych dotyczących użytkownika, takich jak np. ustawienia (typu widok ekranu, wybór języka interfejsu), zapamiętanie zalogowania. Korzystanie z serwisu Infona oznacza zgodę na zapis informacji i ich wykorzystanie dla celów korzytania z serwisu. Więcej informacji można znaleźć w Polityce prywatności oraz Regulaminie serwisu. Zamknięcie tego okienka potwierdza zapoznanie się z informacją o plikach cookies, akceptację polityki prywatności i regulaminu oraz sposobu wykorzystywania plików cookies w serwisie. Możesz zmienić ustawienia obsługi cookies w swojej przeglądarce.
This paper presents a simple and robust process for fabrication of functional electrostatic RF-MEMS switching devices with lifetimes easily exceeding 108 cycles with unipolar actuation at 100 Hz. The device implements a switchable air gap capacitor and is therefore not limited in lifetime by dielectric charging as opposed to contact-type capacitive switches implementing high-k dielectrics. It is shown...
This paper discusses dielectric charging in electrostatic RF-MEMS switches. We show that more than one charging mechanism can be present and impacts their lifetime. These different mechanisms can cancel, mitigate or enhance each otherpsilas influence on the lifetime, depending on the materials used and on the test conditions. Contrarily to the common understanding of the dielectric charging, we show...
We show for the first time that the substrate can influence the lifetime of capacitive RF MEMS switches. We demonstrate that the influence of the substrate should not be ignored. The influence of the environment on the lifetime of a switch is different when it is fabricated on two different substrates. We also present that a switch actuated with a DC voltage lower than the pull-in voltage can pull-in...
Nowadays, the armatures in RF-MEMS devices such as switches and variable capacitors mostly consist of highly conductive metals which often show a low thermal stability. This can result in undesired changes in the characteristics of these devices after exposure to high temperatures during (post-)processing steps such as packaging and dry release steps. Therefore we investigated for the first time the...
In the past years, the RF-MEMS activities have focused on the development of generic technology platforms integrating switches as well as tunable and fixed passives components. This is in strict opposition to a former device-centered development of the RF-MEMS technologies. Fruitful efforts were put at IMEC in the reliability analysis and modeling of the devices, the exploration of various packaging...
In the past years, the RF-MEMS activities have focused on the development of generic technology platforms integrating switches as well as tunable and fixed passives components. This is in strict opposition to a former device-centered development of the RF-MEMS technologies. Fruitful efforts were put at IMEC in the reliability analysis and modeling of the devices, the exploration of various packaging...
Podaj zakres dat dla filtrowania wyświetlonych wyników. Możesz podać datę początkową, końcową lub obie daty. Daty możesz wpisać ręcznie lub wybrać za pomocą kalendarza.