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A multi-band operational MEMS microphone inspired by the hearing organ of Ormia ochracea is presented The novel feature is that the device has both integrated capacitive and piezoelectric sensing capability. Similar to our previous designs, the new design works as a bi-directional microphone and has four separate resonance frequencies below 10 kHz, with intended application for human speech recognition...
We designed, fabricated, and experimentally demonstrated a dynamically balanced z-axis MEMS vibratory gyroscope utilizing the concentrated suspension architecture. This architecture allows for a high degree of structural symmetry (degeneracy of modes), potentially enabling high precision Rate Gyroscopes (RG) and Rate Integrating Gyroscopes (RIG). The full dynamic balance of the design is enabled by...
A new bio-inspired multi-band directional MEMS microphone based on the hearing properties of the fly Ormia ochracea is presented, together with the behavioral influence of 3D-printed housings. The multi-user foundry fabricated microphone operates on four frequency bands, all below 10 kHz and acts as a pressure gradient directional microphone with figure of eight polar pattern, or as an omni-directional...
We report on a new design approach for X-Y symmetric resonator, that can be mechanized as rate (RG) or rate-integrating gyroscope (RIG), with a single digit as-fabricated frequency split between the two mechanical out-of-phase operational modes. We explore concentration of critical mechanical elements (shuttle-spring-anchor modules) close to the center of the die to mitigate the effect of the fabrication...
We propose a room temperature, all electrical driving and detecting, very sensitive bolometer using a doubly clamped microelectromechanical (MEMS) resonator, which can be excited and detected by using piezoelectric effect. The device detects the shift in the resonance frequency caused by heating and works as a very sensitive bolometer. The preliminary device showed a frequency responsivity about 100...
Graphene is a typical two-dimensional material which has fascinating electrical, mechanical, and optical properties. In particular, graphene-based smart MEMS/NEMS devices can automatically respond to external electric stimulation and convert to mechanical movement. Actuator is one of the most potential applications of graphene-based MEMS. However, its reliability investigation has rarely been reported...
In this paper, we present a high-resolution wet etching technology of 1.5 μm-thick electroless nickel alloy film. The minimum feature size was successfully reduced to about 10 μm. The developed etching technology is well compatible to conventional micro-electro-mechanical systems (MEMS) processes, and has been successfully utilized on the 4-inch wafer as well. It could be expected more practical application...
Micro-masonry is a microassembly technique that is based on transfer printing and direct bonding. This paper presents the assembly of MEMS mechanical sensors and actuators based on this micro-masonry technique. Microfabrication processes for retrievable MEMS components (e.g., combs, flexure beams, and metal pads) are developed. As manipulation tools, elastomeric microtipped stamps with switchable...
The characterization of electrical properties of individual nanowires/nanotubes inside scanning electron microscopes has been demonstrated. However, the effect of electron-beam irradiation on the characterization results is not clearly known. Using a MEMS device we developed for the electromechanical characterization of nanowires, this study reveals that electron irradiation significantly alters the...
We present for the first time a new concept for low-cost fabrication of a monolithic 3-axis MEMS compass using integrated permanent magnets and based on a technology compatible with inertial MEMS sensors. Piezoresistive gauges of nanometric scale enable to reduce the sensor size without sensitivity loss. Magnetometers were designed for sensitivities of 9V/T and resolutions less than 10nT/√Hz at a...
This paper reports on development of AFM-like active CMOS-MEMS conductive probes and arrays. The active probes are aimed for scanning tunneling microscopy (STM) imaging and field-emission (FE) assisted nanostructure formation. Two kinds of STM tip approaches compatible with CMOS-MEMS process — Electron-Induced Beam Deposition (EBID) and Spindt tip method — are presented, and their functionality is...
The integration of micro electromechanical systems (MEMS) with ICs is one of the key technologies for MEMS ubiquitous applications and commercialization. This paper therefore presents a high sensitive micro disk resonator with on-disk piezoelectric PZT thin film as the transducer for better impedance matching to CMOS, and for disk self-actuation self-sensing at low actuation voltage and low power...
This paper reports on an optimal support anchoring for bar-type BAW resonators. We demonstrate both theoretically and experimentally the implementation of long (in terms of acoustic wavelength) T-supports without compromising neither on the Q-factor nor on the electromechanical (pull-in) stability of the resonator. Compared to the more common straight supports, these long T-supports provide rigidity...
An acceleration latching switch with integrated normally Open/Close paths is presented in this paper. Two arch trusses used as fracture parts of the normally-close path are connected in series to form the normally close path, which will be broken and latched by the latching mechanism to reach the open state once the input acceleration beyond threshold. Moreover, the normally-open path is consisted...
A micro-acceleration latching switch with barb latching mechanism is presented in this paper. The latching mechanism which likes a “barb” can make the switch latch reliably. What's more, the flexible contacts can prevent the switch from opening due to impact resulting from the rebound or vibration of proof mass when the switch is latched. The stops which limit displacement will also improve the reliability...
Due to force scaling laws, adhesion forces at the micro scale make rapid, accurate release of micro objects a challenge in pick-place micromanipulation. This paper presents a new MEMS microgripper integrated with a plunging mechanism to impact the micro object for it to gain sufficient momentum to overcome adhesion forces. The performance was experimentally quantified through the manipulation of 7...
A high quality factor (Q-factor) piezoelectric lead zirconat titanate (PZT) film actuated single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive mass detection. Intrinsic energy dissipation and other negative effects from PZT film were successfully compressed by separating the PZT actuator from the resonant structure. Excellent Q-factor, which is comparable...
The state-of-the-art of MEMS-based fuel cell can not meet the requirements of on-chip power application owing to low cell voltage and poor power density. This is mainly resulted from poor process compatibility between traditional fuel cell technology and MEMS industry. In particular, graphite-based porous electrode is difficult to be integrated into MEMS-based fuel cell so that there is lack of enough...
MEMS-based micro direct methanol fuel cells (muDMFCs) have poor performance because polymer electrolyte membrane fuel cell (PEMFC) is not well compatible with MEMS process. In this work, fine pattern was formed on PEM using nanoimprint technology. Using the nanoimprint PEM, a MEMS-based muDMFC was fabricated. The MEMS-based muDMFC had the open circuit voltage (OCV) of 0.74 V and the maximum power...
The basic structure of MEMS millimeter-wave phase shifters was consisted of a coplanar waveguide (CPW) transmission line periodically loaded with several thin metallic membranes. A new method was developed to obtain lower-loss microwave coplanar waveguide (CPW) by means of forming porous silicon (PS) on low-resistivity silicon wafer. The CPW fabricated on porous silicon (PS)/oxidated porous silicon...
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