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This work presents the methodology to synthesize single-walled carbon nanotubes and place them directly on paper utilizing a micro chemical vapor deposition (μCVD) system. In contrast to conventional CNTs (carbon nanotubes) synthesis in high temperature furnaces, the technique of μCVD with localized heating provides the foundation for the direct growth of CNTs on paper. Experimentally, self-aligned...
We have successfully demonstrated the direct pick and place of CNT bundles from a CNT growth substrate to a working specimen for strain sensing applications. The whole assembly process can take as little as one minute by manual operation under a probe station. A strain sensor based on CNT bundles has been constructed by adding electrical contacts. Experimental results show 2.1% relative resistance...
Densely packed carbon nanotube (CNT) forest on silicon wafer has been fabricated by combining the process of mechanical press and liquid densification. Advantages from the densely packed CNT forest prototype devices include: (1) 16-fold volume reduction with the same amount of CNT forest as compared to the as-grown CNT forest; (2) preservations of aligned CNT organization and natural contacts to the...
The conventional chemical vapor deposition system has been miniaturized to the micro scale, leading to several potential advantages for the synthesis of nanostructures. First, minute heat capacity leads to fast temperature stabilization. Second, tiny chamber volume helps for rapid gas species exchanges. Third, small Reynolds number ensures laminar flow for better control of deposition sources. Forth,...
Planar micro supercapacitors utilizing vertically aligned carbon nanotube (CNT) forests with the design of interdigital electrodes have been demonstrated. Conductive substrates using Mo/Al/Fe metal stack shows best CNT forest synthesis results with high electrical conductivity and dense CNT structures. Prototype devices show measured specific capacitances about 1000 times higher than those with plain...
The "healing" of nano-to-micro electrical contact between a single carbon nanotube (CNT) and silicon micro structure has been demonstrated using the technique of electrical breakdown. Experimental results show that the resistance of an in-situ synthesized CNT was "healed" from an original value of infinite to 7 MOmega. The experimental breakdown voltage is 10 V and the electrical...
This work presents the synthesis, assembly and integration of a single, suspended multiwalled carbon nanotube (MWCNT) as a Pirani gauge using localized synthesis. By monitoring electrical connection of the CNT, the controlled growth process allows the synthesis of a single CNT within 20 seconds. I-V curves of the CNT show reduced CNT resistance in a vacuum pressure environment compared with the CNT...
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