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This paper investigates the acoustic losses of propagating eigenmodes through the acoustic mirror of a solidly mounted resonator (SMR), aiming to clarify how resonator properties are influenced by reflection coefficients for the thickness shear (TS) wave as well as that for the thickness extensional (TE) wave. To this end, we analyze the effective acoustic admittance for several test structures with...
Preparation of piezoelectric AlN thin films on diamond substrates, and their application to SHF SAW devices are discussed. It is confirmed that DC-TFTS method enable to prepare highly c-axis oriented AlN films on polycrystalline diamond substrates. The AlN surface was smooth enough to fabricate fine electrodes with the width of the order of sub-microns. Transversal filters working around 5 GHz were...
This paper describes the development of extremely wideband and very low-loss RF SAW filters of ladder type for future communication systems. Because of its large electromechanical coupling factor for SH-type SAWs, a Cu-grating/15degYX-LiNbO3 structure was employed as a substrate. At first, four-stage ladder type filter was designed and fabricated, where width/length weighted dummy electrodes were...
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