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We carried out simultaneous measurement of SERs and cosmic ray neutron spectra for the first time. We measured SERs using 90 nm CMOS SRAM chips and measured neutron spectra using a Bonner multisphere spectrometer. We carried out the SER field measurement at the 4200 m summit of Mauna Kea, which is the most suitable place for SER field measurements because the neutron flux is over 10 times greater...
The depth profile of acid generator distribution is investigated using X-ray reflectivity measurement at Spring-8. The depth profile in tBu-PHS thin resist films is made clear.
We have developed a new type of QCM sensor for real-time detection of chemical contaminant emission in SMIF pods. Because there is no need to modify SMIF pods when applying this sensor, introducing the QCM system to fabrication lines is very easy.
Photoelectron spectra (PESs) of Na m- (NH 3 ) n (m=<3) are investigated to explore the solvation of sodium atom and its aggregates in small ammonia clusters. For Na - (NH 3 ) n , we examine the PESs with an improved resolution and confirm the spontaneous ionization of the Na atom in small clusters. As for Na 2- (NH 3 ) ...
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