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This paper presents a wide-band RF shunt capacitive switch reconfigurable by means of electrically triggered Vanadium Oxide (VO2) phase transition to build a true-time delay (TTD) phase shifter. The concept of VO2-based reconfigurable shunt switch has been explained and experimentally demonstrated by designing, fabricating and characterizing an 819 μm long unit cell. The effect of bias voltage on...
This work is focused on the design and fabrication of a capacitive ceramic pressure sensor using LTCC technology. The multilayer technology helps us to tailor the thickness of the flexible membrane depending on the pressure range we are working in. In the bottom part of the substrate a entire signal conditioning electronics is located. An integrated circuit suitably chosen for this application measures...
This paper explores the design and fabrication of Micro-Electro-Mechanical capacitors based on vertical carbon nanotube arrays. The devices are realized in vertically single-clamped parallel plate configurations using a dense array of vertically grown MWCNTs on metal lines. The capacitance tuning is performed by electrostatic actuation. From the pull-in voltage value, based on novel analytical model...
The reliability and charging/discharging dynamics of wideband (1.5-14 GHz) phase shifters made of MEMS capacitive switches using Aluminum Nitride (AlN) as dielectric are originally reported. Phase shifter lifetimes exceeding 109 cycles are achieved in hot-cycling (+5 dBm RF power). Dynamic tests were done for the first time under ambient conditions (50% humidity) over 2times109 cycles with no major...
This paper presents an in-depth study of the design, modelling, circuit parameter extraction and characterization of a distributed MEMS digital microwave phase shifter. Bridge-type digital capacitors periodically loaded on a 5 mm CPW (with an actuation voltage of 22 V) has been fabricated and successfully measured in a wide range of frequencies (1-14 GHZ), achieving a true-time delay of 25 ps. Experimental...
The present work deals with the development and control of a converter to drive piezoelectric actuators. Due to the piezoelectric load specification, a half-bridge converter is proposed. Such a converter is analyzed considering charging and discharging modes. The converter is controlled by means of a sliding mode control strategy, employing two different sliding surfaces for the charging and discharging...
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