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A single-transistor advanced contactless EEPROM (ACEE) array technology with an 8.6 μm2 cell developed for a single-power-supply 5-V only 4-Mb flash EEPROM is described. This ACEE technology has 0.8 μm minimum lithographic feature sizes and a novel sublithographic remote tunnel diode structure. Low-voltage isolation between bitlines of the same cell has been achieved by diode isolation...
A full 4-Mb flash EEPROM was fabricated in 0.8-μm CMOS and its functionality was verified. Conservative 1.0-μm features were used in the periphery, resulting in a die area of 95 mm2. The device features 5-V-only operation and either full-chip or sector erase. A segmented architecture, remote row decode, and innovative design techniques provide the sector erase feature and high-voltage...
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