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Developing MEMS sensors with a high strain sensing range (up to 0.6) and a stepwise sensing mechanism could enable widespread downstream applications, by allowing intimate, mechanically conformable integration with soft biological tissues. Most approaches to date focus on challenges to associate the sensing mechanism with high peak strains under large deformation. By designing and characterizing test...
This paper presents a renewable biochemical oxygen demand (BOD) microsensor based on a sensing element of magnetically functionalized microorganism and a transducer of ultramicroelectrode array (UMEA). Different from the traditional BOD sensor which includes an immobilized microbial film, the magnetically functionalized microorganism was retained on the UMEA with a permanent magnet to simplify the...
By using sidewall electrode technology, both record small functional TiO2 selection device (1 × 5 nm2) and HfO2 based RRAM device (1 × 3 nm2) were for the first time successfully demonstrated in this work, improving the understanding of the switching mechanism in an ultra-small, functional resistive random access memory (RRAM) device. The tunneling based low temperature back-end selection devices...
This paper reports on the sensing of large strain using a mechanically actuated switch gate and a variable resistor surface creasing test structure. Test structures with different gate and interconnect/wiring geometries have been designed, fabricated and characterised. They respond to designed strain values with a reduction in device resistivity of 11 to 12 orders of magnitude. Results from strain...
We demonstrate free-flight thrust control of the cyborg beetle which consisted of a living beetle platform (Mecynorrhina torquata), a microcomputer backpack (neuromuscular electrical stimulator) and a micro battery. A pair of thin wire electrodes coming from outputs of the backpack was implanted into the left or right subalar muscle, a major flight muscle of the beetle. The implanted muscle was stimulated...
A sidewall electrode technology was successfully developed for the first time in this study, improving the understanding of the working mechanism in an ultra small, functional HfO2-based resistive random access memory (RRAM) device (< 1 × 3 nm2). This technology exhibits potential for application in atomic-scale memories. The 1 × 3 nm2 RRAM device exhibited an excellent performance, featuring a...
With the increase of accelerator luminosity, the rate requirement for timing MRPC becomes important. Usually MRPCs are assembled with ordinary glass plates of 1.0 mm or thicker, but their rate capability is only about 200 Hz/cm2, which cannot afford to the future high rate requirement. DC model and a two dimensional resistor network model suggested that the rate capability of MRPC is largely dependent...
SF6 is widely used in the high-voltage field as its excellent insulation performance. but now, the application of SF6 is limited to use more and more because it makes the greenhouse effect. So how to find out some gas to instead of it and how to reduce its using has become a hot issue. In this paper, the characteristics of SF6/N2 gas mixtures are investigated. considering C-GIS structural features,...
This paper demonstrates several enhanced microfluidic functions achieved by integrating two different micro droplet actuation systems (Surface Acoustic Waves (SAW) and ElectroWetting-On-Dielectric (EWOD)). The paper reports how SAW can be employed to help EWOD create and split droplets by augmenting the EWOD force to complete the operation. It also demonstrates how EWOD can be used to guide and precisely...
This paper presents details of the design and fabrication of test structures specifically designed for the characterisation of two distinct digital microfluidic technologies: Electro-Wetting On Dielectric (EWOD) and Surface Acoustic Wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterise enhanced droplet manipulation...
This paper details the first reported integration of two advanced digital microfluidic technologies where 100 mum silicon cubes are transported with electrowetting on dielectric (EWOD) and the droplet then held with EWOD while the silicon cubes are mixed with another liquid using a surface acoustic wave (SAW). Together these two technologies provide a comprehensive lab-on-a-chip combination with well...
The first electrochemical actuator with a parylene bellows for intraocular drug delivery is presented in which the bellows separates the electrolysis actuation chamber from the drug reservoir. The parylene bellows was fabricated using a novel polyethylene glycol (PEG)-molding process and mechanically characterized. Optimization of the gas generation efficiency of the actuators was performed. We achieved...
This paper proposes a direct metal patterning method on three-dimensional structures with vertical side walls. It uses a 3-D multi-height silicon shadow mask made by double-side Deep Reactive Ion Etching (DRIE). Aluminum has been successfully patterned on the top, bottom and vertical side walls of 280mum wide trench with a depth of 250mum by sequentially tilting the wafer at three different angles...
A silicon swimming robot or pond skating device has been demonstrated. It floats on liquid surfaces using surface tension and is capable of movement using electrowetting on dielectric (EWOD) based propulsion. Its dimensions are 6 times 9 mm with a thickness of 380 mum. The driving mechanism involves the trapping of air bubbles within the liquid onto the hydrophobic surface of the device with the subsequent...
This paper discusses the main issues associated with integrating electrode controlled droplet motion using electro wetting on dielectric (EWOD) with IC foundry technology. The motivation behind this approach is based upon the desire to increase the number of control electrodes, which requires the implementation of on-chip line-column microelectronics. Increasing the number of electrodes is attractive...
Micro actuators using electrostatic repulsive-force induced by asymmetric electric field has no problem of pull-in instability existing in electrostatic attractive-force based micro actuators, and their stroke is not limited by the initial gap between electrodes. In this paper, an improved structure of micro actuator based on electrostatic repulsive-force is presented to achieve a large vertical stroke...
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