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The work-function fluctuation (WKF) induced threshold voltage variability (σVth) in 16-nm-gate bulk FinFET devices is for the first time explored and modeled by an experimentally validated Monte Carlo simulation approach. A comprehensive analysis of variability sources of FinFETs is first conducted to show the significance of WKF in reliability of nano-device. Then, the influences of grain size of...
In this paper, we, for the first time, examine the spectral reflectivity of hemisphere-, cone-, cylinder-, and parabola-shaped silicon nitride (Si3N4) subwavelength structures (SWSs). A multilayer rigorous coupled-wave approach is advanced to evaluate the reflection properties of Si3N4 SWSs. We optimize the aforementioned four different shapes of SWSs in terms of effective reflectance over a range...
In this study, reflection properties of sub-wavelength structures (SWS) on silicon nitride (Si3N4) antireflective coatings are investigated. Numerical calculation of SWS reflection based on a rigorous coupled-wave approach is conducted and compared with the measurement of fabricated samples. We compare the results of single and double-layer-antireflection (SLAR and DLAR) coatings with SWS on Si3N4...
In this study, we explore the spectral reflectivity of pyramid-shaped silicon nitride (Si3N4) sub-wavelength structures (SWS). First, a multilayer rigorous coupled-wave approach is advanced to investigate the reflection properties of Si3N4 SWS. We first optimize Si3N4 SWS structure for the best effective reflectance properties. The results of our study show that a lowest effective reflectivity of...
Carbon nanotubes (CNT) are grown in anodic aluminum oxide (AAO) and use as field emitters in a triode structure. To fabricate the field-emission triode structure, nanoporous AAO thin layer is first prepared on the Si(100) substrate, followed by the growth of vertically aligned carbon nanotubes in AAO pore channels by electron cyclotron resonance chemical vapor deposition. The SiO2 dielectric and Al...
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