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In this study, the nMOSFETs with contact-etch-stop-layer (CESL) stressor and SiGe channel have been fabricated with a modified 90-nm technology. The performance of nMOSFETs and stress distribution in the channel region have been investigated. The hot carrier reliability of the SiGe-channeled nMOSFETs with various CESL nitride layers has also been extensively studied. In addition, the impact of stress...
Si-C:H film has attracted a lot of attention recently for application in Si-based thin film solar cells, since its bandgap can be easily tunable over a range of 1.5–2.5 eV by simply varying the Si to C ratio in the film. Capacitively coupled SiH4/CH4/H2 plasmas are often employed for deposition of high quality Si-C:H film. A better understanding of the physical and chemical mechanisms in the plasma...
Metal-oxide-semiconductor (MOS) capacitors incorporating atomic-layer-deposited (ALD) LaO/HfZrO stacked gate dielectrics were fabricated. The experimental results reveal that the equivalent oxide thickness (EOT) is 0.65 nm, and the gate leakage current density (Jg) is only 1.9 A/cm2. The main current conduction mechanisms are Schottky emission, Poole-Frankel emission, and Fowler-Nordheim tunneling...
Metal-oxide-semiconductor (MOS) capacitors with atomic-layer-deposition (ALD) HfLaO or HfZrLaO high-κ gate dielectrics have been fabricated, and the reliability of time-dependent-dielectric-breakdown (TDDB) characteristics have also been analyzed. HfZrLaO shows a better performance in comparison with HfLaO. Moreover, some important parameters for HfZrLaO and HfLaO gate dielectrics are compared in...
This paper presents a two-machine flowshop scheduling problem with family sequence-dependent setup times and a common due window. The objective is to minimize the sum of earliness and tardiness according to the common due window. The problem is found to be NP-hard. And a niche genetic algorithm (NGA) with sharing as the population diversity mechanism is developed for it, in which the distance of two...
Vegetation parameters are important to improve the performance of numerical weather prediction, global change monitoring, and ecosystem modeling. In the study, Discrete Anisotropic Radiative Transfer (DART) model is employed to simulate Bi-directional Reflectance Distribution Function (BRDF)of heterogeneous landscape scenes. The simulated BRDF is required to match the measured BRDF by the POLDER (POLarization...
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